| PLUTO-Parameters | ||||
| Model | PLUTO-3015D | PLUTO-4020D | PLUTO-6020D | PLUTO-12025D |
| Laser power | 1000-15000 W | 1000-15000 W | 1000-15000 W | 1000-15000 W |
| Table size | 3000*1500 | 4000*2000 | 6000*2000 | 12000*2500 |
| Max. positioning speed | 120 | 120 | 120 | 120 |
| Positioning precision | ± 0.03 | ± 0.03 | ± 0.03 | ± 0.03 |
| Repeated positioning precision | ± 0.01 | ± 0.01 | ± 0.01 | ± 0.01 |
| X/Y axis max. AC speed | 1.5G | 1.5G | 1.5G | 1.5G |